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| Автор: Stefan Landis |
| Издательство: John Wiley & Sons Limited |
| Cтраниц: 1 |
| Формат: PDF |
| Размер: 0 |
| ISBN: 9781118621233 |
| Качество: excellent |
| Язык: |
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Описание:
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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
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Пресс - релиз
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